A Closed-Loop Control Mathematical Model for Photovoltaic-Electrostatic Hybrid Actuator with a Slant Lower Electrode Based on PLZT Ceramic
نویسندگان
چکیده
In this paper, a novel photovoltaic-electrostatic hybrid actuator with slant lower electrode based on the PLZT ceramic is proposed. The mathematical model of established. Then, and parameters identified, simulation closed-loop displacement control for carried out. results show that can be controlled successfully at particular value within pull-in by light source. Furthermore, response speed output faster than parallel electrode, offering good potential to advance current applications micro-electro-mechanical system.
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ژورنال
عنوان ژورنال: Actuators
سال: 2021
ISSN: ['2076-0825']
DOI: https://doi.org/10.3390/act10110285